Optical waveguide formed by diffusing metal into substrate

Details Optical waveguide formed by diffusing metal into substrate Optical waveguide formed by diffusing metal into substrate

1979-09-24

1982-05-11

Morgenstern, Norman

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

4271262, 4271263, 427108, 427100, 427167, 4273835, G02B 514

Patent

active

043290167

ABSTRACT:
The specification describes an optical waveguide device formed by diffusing a metal into a substrate which may be either a semiconductor material or a dielectric material. The substrate is first coated with a liquid composition comprising organo-metallic solutions of the desired metal and silica. The coated substrate is then heated at an elevated temperature for a period of time sufficient to cause the organic portion of the solution to decompose, thereby leaving a composite film comprising an oxide of the desired metal and SiO.sub.2. Upon further heating, the metal from the metal oxide diffuses into the substrate. The residual composite film may be left in place or removed.

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