Optical waveguide, fabrication method therefor and optical...

Details Optical waveguide, fabrication method therefor and optical... Optical waveguide, fabrication method therefor and optical...

2005-07-05

2005-07-05

Font, Frank G. (Department: 2883)

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

C385S132000

Reexamination Certificate

active

06915055

ABSTRACT:
An optical waveguide, a fabrication method therefor and an optical waveguide device are disclosed wherein a sink of a core layer (waveguide core) can be suppressed while formation of cracks and air bubbles is suppressed. The optical waveguide comprises a substrate, and a lower clad layer, a core layer and an upper clad layer formed on the substrate such that the core layer is buried within the upper and lower clad layers. The lower clad layer is formed from a silica glass-type material, which is formed using a trialkylsilyl-type compound as an organic source, such that the melting temperature thereof is higher by a predetermined temperature or more than that of the upper clad layer.

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