Optical waveguide element, optical element, method for producing

Optical waveguides – Having nonlinear property

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385 11, 385129, 385130, 385131, 385141, 359326, 359328, 359332, 437130, 437 51, G02B 600, G02F 135, H01L 21208

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059434651

ABSTRACT:
An excellent periodic domain-inverted structure formed on a ferroelectric optical single crystal substrate is provided having an improved crystalline property of the substrate and an improved resistance to optical damage and output of the domain-inverted structure and the like optical waveguide structure by forming protruded and recessed portions on a single-domained ferroelectric optical single crystal substrate 1, growing a film of a ferroelectric optical single crystal film 4 on the respective recessed portion of the single crystal substrate 1 by a liquid phase epitaxial growing process. At that time, the Curie temperature of the film 4 is lower than the liquid phase epitaxial growing temperature of the film 4, and the Curie temperature of the substrate 1 is higher than the liquid phase epitaxial growing temperature of the film 4, and the film 4 is polarized in an opposite direction to the polarization direction of the substrate 1.

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MOC/GRIN '93 Kawasaki, "Fundamental Properties of LiNbO3 Thin-Film Optical Waveguide Grown by Liquid Phase Epitaxy," by Atsuo Yamada et al., pp. 58-61.
J. Appl. Phys. 75 (3), Feb. 1, 1994, "Domain Inversion in LiTaO3 Using Proton Exchange Followed By Heat Treatment," by Kiminori Mizuuchi et al., pp. 1311-1318.
Tatsuo Kawaguchi, et al., Domain-inverted Growth of LiNbO.sub.3 Films by Liquid-Phase Epitaxy, Journal of Crystal Growth, Jul. 1997, Elsevier, Netherlands, vol. 178, No. 4, pp. 524-528.

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