Optical waveguides – Optical waveguide sensor
Reexamination Certificate
2007-09-25
2007-09-25
Pak, Sung (Department: 2874)
Optical waveguides
Optical waveguide sensor
C385S013000
Reexamination Certificate
active
10781339
ABSTRACT:
A substrate incorporates a mechanical cantilever resonator with passive integrated optics for motion detection. The resonator acts as a waveguide, and enables optical detection of deflection/displacement amplitude, including oscillations. In one embodiment, the cantilever comprises a silicon waveguide suspended over a substrate. A reflector structure faces a free end of the suspending cantilever, or a waveguide is supported facing the free end of the suspended cantilever to receive light transmitted through the silicon waveguide cantilever. Deflection/displacement of the cantilever results in modulation of the light received from its free end that is representative of the displacement. Ring resonators may be used to couple different wavelength light to the waveguides, allowing formation of an array of cantilevers.
REFERENCES:
patent: 4242096 (1980-12-01), Oliveira et al.
patent: 4300813 (1981-11-01), Gravel
patent: 4414471 (1983-11-01), Rines
patent: 4855255 (1989-08-01), Goodhue
patent: 4999284 (1991-03-01), Ward et al.
patent: 5001053 (1991-03-01), Takahashi et al.
patent: 5135852 (1992-08-01), Ebersole et al.
patent: 5265177 (1993-11-01), Cho et al.
patent: 5306644 (1994-04-01), Myerholtz et al.
patent: 5420688 (1995-05-01), Farah
patent: 5437186 (1995-08-01), Tschulena
patent: 5541057 (1996-07-01), Bogart et al.
patent: 5550063 (1996-08-01), Bogart
patent: 5658732 (1997-08-01), Ebersole et al.
patent: 5705399 (1998-01-01), Larue
patent: 5719324 (1998-02-01), Thundat et al.
patent: 5756279 (1998-05-01), Ebersole et al.
patent: 5807758 (1998-09-01), Lee et al.
patent: 5814525 (1998-09-01), Renschler et al.
patent: 5838870 (1998-11-01), Soref
patent: 5945280 (1999-08-01), Fawcett et al.
patent: 6016686 (2000-01-01), Thundat
patent: 6124765 (2000-09-01), Chan et al.
patent: 6203983 (2001-03-01), Quate et al.
patent: 6263736 (2001-07-01), Thundat et al.
patent: 6436647 (2002-08-01), Quate et al.
patent: 6525307 (2003-02-01), Evans et al.
patent: 6665476 (2003-12-01), Braun et al.
patent: 6721053 (2004-04-01), Maseeh
patent: 2003/0142597 (2003-07-01), Park et al.
patent: 2003/0154771 (2003-08-01), de Charmoy et al.
patent: 2005/0018946 (2005-01-01), Tran et al.
patent: 2005/0167508 (2005-08-01), Syms et al.
patent: 9-203626 (1997-08-01), None
S.T. Chu et al. An eight-channel add-drop filter using vertically coupled microring resonators over a cross grid. IEEE Photonics Technology Letters, vol. 11 No. 6, pp. 691-693, Jun. 1999.
R. Muller et al. Technological processes and modeling of opto-electro-mechanical microstructures. Materials Science in Semiconductor Processing, vol. 3, pp. 427-431, Oct. 2000.
A. V. Churenkov. Silicon micromechanical optical waveguide for sensing and modulation. Sensors and Actuators A, vol. 57, pp. 21-27, Oct. 1996.
“1.2.1 Contact AFM”,A Practical Guide to Scanning Probe Microscopy, Chapter 1, Section 1.2.1, Thermo Microscopes website: http://www.topometrix.com/spmguide/1-2-1.htm, (Observed Oct. 28, 2002), 3 pgs.
Baselt, D. R., et al., “A High-Sensitivity Micromachined Biosensor”,Proc. IEEE, 85 (4), (1997),672-680 (Apr.).
Baselt, D. R., et al., “Biosensor Based on Force Microscope Technology”,J. Vac. Sci. Technol. B., 14 (2), (1996), 789-793.
Boyd, R. W., et al., “Sensitive Disk Resonator Photonic Biosensor”,Applied Optics, 40(31), (2001),5742-5747 (Nov.).
Brecht, A. , et al., “Optical Probes and Transducers”,Biosensors&Bioelectronics, 10(9-10), (1995),923-936.
Carr, D., et al., “Fabrication of Nanoelectromechanical Systems in Single Crystal Silicon Using Silicon on Insulator Substrates and Electron Beam Lithography”,J. Vac. Sci. Technol. B., 15(6), (1997),2760-2763 (Nov.).
Carr, D. W., et al., “Measurement of Mechanical Resonance and Losses in Nanometer Scale Silicon Wires”,Applied Physics Letters, 75(7), (1999), 920-922.
Carr, D. , et al., “Measurement of Nanomechanical Rresonant Structures in Single-Crystal Silicon”,J. Vac. Sci. Technol. B, 16(6), (1998), 3821-3824.
Fritz, J. , et al., “Translating Biomolecular Recognition into Nanomechanics”,Science, 288, (2000), 316-318 (Apr.).
Ilic, B., “Mechanical Resonant Immunospecific Biological Detector”,Applied Physics Letters, 77(3), (2000), 450-452 (Jul.).
Ilic, B., et al., “Ultra-Sensitive Resonant Frequency Based Mass Detector”,Proc. Electrochem. Soc., (2000), 1 pg.
Kadar, Z., “Integrated Resonant Magnetic Field Sensor”, http://www.xs4all.nl/˜kadzsol/thesis/ch2/chap2.html, Philosophical Dissertation, Chapter 2, “Design Considerations”,(1997), 21 pgs.
Lang, H., et al., “A Chemical Sensor Based on a Micromechanical Cantilever Array for the Identification of Gases and Vapors”,Applied Physics A, 66, (1998), S61-S64.
Lang, H. P., et al., “Sequential Position Readout From Arrays of Micromechanical Cantilever Sensors”,Applied Physics Letters, 72(3), (1998), 383-385 (Jan.).
Meyer, G., et al., “Novel Optical Approach to Atomic Force Microscopy”,Applied Physics Letters, 53(12), (1988), 1045-1047 (Sep.).
Newell, W. E., “Miniaturization of Tuning Forks—Integrated Electronic Circuits Provide the Incentive and the Means for Orders-of-Magnitude Reduction in Size”,Science, 161(3848), (1968), 1320-1326 (Sep.).
Petersen, K. E., “Silicon as a Mechanical Material”,Proceedings of the IEEE, 70(5), (1982), 420-469 (May).
Sarid, D.,In: Scanning Force Microscopy With Applications to Electric, Magnetic and Atomic Forces, Oxford University Press, New York, NY,(1994), 271 pgs.
Satoh, K., et al., “Effects of Various Thiol Molecules Added on Morphology of Dendrimer-Fold Nanocomposites”,Journal of Colloid and Interface Science, 255, (2002),312-322.
Silverman, P. J., “The Intel Lithography Roadmap”,Intel® Technology Journal, 6(2), (2002), 55-61.
Thundat, T. , et al., “Detection of Mercury Vapor Using Resonating Microcantilevers”,Applied Physics Letters, 66(13), (1995), 1695-1697 (Mar.).
Thundat, T. , et al., “Thermal and Ambient-Induced Deflections of Scanning Force Microscope Cantilevers”,Applied Physics Letters, 64(21), (1994), 2894-2896 (May).
de Almeida Vilson Rosa
Ilic Bojan (Rob)
Lipson Michal
Panepucci Roberto R.
Pak Sung
Schwegman Lundberg & Woessner, P.A.
Stahl Mike
LandOfFree
Optical waveguide displacement sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Optical waveguide displacement sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical waveguide displacement sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3752772