Optical waveguides – Integrated optical circuit
Reexamination Certificate
2007-09-11
2007-09-11
Bovernick, Rodney (Department: 2874)
Optical waveguides
Integrated optical circuit
C385S129000
Reexamination Certificate
active
11082519
ABSTRACT:
The spacers3and4and the recess is formed on the supporting substrate2to support the upper cladding layer7. The intermediate surface22and23lower than the top surface of the spacers3and4and higher than the inner bottom surface of the recess is formed on the supporting substrate2. Each of the height between the top surface of the spacers3and4and the intermediate surfaces22and23, and the height between the intermediate surfaces22and23and the inner bottom surface of the recess of the second substrate2becomes thin compared with the total thickness of the lower cladding layer. Thus, when the resin for the lower cladding layer9is cured to shrinkage, the inner stress in the resin is dispersed and the occurrence of the wrinkle12and the void decreases.
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Hayamizu Kazuyuki
Higuchi Masayoshi
Hosokawa Hayami
Komura Yoshiyuki
Taniguchi Hisashi
Bovernick Rodney
Omron Corporation
Osha & Liang LLP
Stahl Mike
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