Optical waveguide device bonded through direct bonding and a met

Details Optical waveguide device bonded through direct bonding and a met Optical waveguide device bonded through direct bonding and a met

1995-08-04

1998-07-28

Martin, Roland

Etching a substrate: processes

Forming or treating optical article

216 52, 216 97, 156 99, B29D 1100

Patent

active

057858748

ABSTRACT:
An optical waveguide device including a support substrate, a glass substrate, and a thin film layer formed on at least one of the substrates, if required. The support substrate and the glass substrate are bonded through direct bonding, and the glass substrate includes an optical waveguide as a part thereof. A layer having a refractive index lower than that of the glass substrate may be formed on the glass substrate. A method for fabricating such an optical waveguide device is also provided.

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