Optical waveguide device and method for fabricating the same

Optical waveguides – Directional optical modulation within an optical waveguide – Electro-optic

Reexamination Certificate

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C385S040000, C385S129000, C385S131000

Reexamination Certificate

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06873751

ABSTRACT:
An optical waveguide comprising an MgO substrate10, and a slab waveguide layer24formed on the MgO substrate10and including a core layer18of a ferroelectric or an antiferroelectric, further comprises a stress alleviating layer12which substantially lattice-matches with the MgO substrate and the slab waveguide layer24and has an average thermal expansion coefficient in the range of 7.0×10−6-14.0×10−6/° C. at the room temperature to 700° C. Accordingly, the optical waveguide device utilizing the magnesium oxide substrate can be formed without breaking the optical waveguide layer and the magnesium oxide substrate itself.

REFERENCES:
patent: 6078717 (2000-06-01), Nashimoto et al.
patent: Hei 09-005797 (1997-01-01), None
patent: 2000-047271 (2000-02-01), None
patent: 2000047271 (2000-02-01), None
patent: 3144270 (2001-03-01), None
patent: 2003098559 (2003-04-01), None
JP 2000047271 (Nashimoto et al.) Feb. 18, 2000 (machine translation). [online] [retrieved on May 11, 2004]. Retrireved from JPO website.*
Chen et al., “Guided-Wave Electro-Optic Beam Deflector Using Domain Reversal in LiTaO3”, Journal of Lightwave Technology, vol. 12, No. 8, Aug. 1994, pp 1401-1404.

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