Optical waveguide device and manufacturing method thereof

Details Optical waveguide device and manufacturing method thereof Optical waveguide device and manufacturing method thereof

2008-04-22

2008-04-22

Healy, Brian M. (Department: 2883)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S029000, C385S129000, C385S130000, C385S132000, C385S014000, C216S024000

Reexamination Certificate

active

07361520

ABSTRACT:
An optical waveguide device which includes an optical waveguide part and a photonic device mounting part is provided. A mask is patterned after high-temperature annealing to form a pedestal block on which a light emitting device is mounted. Thus, there is no influence on the mask, even if the device undergoes the heat treatment at a high temperature during the manufacturing process. This enables formation of the pedestal block with high accuracy. Therefore, it is possible to achieve an optical coupling with high accuracy in mounting a light emitting device on the pedestal block.

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