Optical waveguide device

Details Optical waveguide device Optical waveguide device

2005-04-05

2005-04-05

Frech, Karl D. (Department: 2876)

Optical waveguides

Planar optical waveguide

C385S014000, C385S131000

Reexamination Certificate

active

06876808

ABSTRACT:
To obtain an optical waveguide device suppressed in fluctuations of characteristics of optical waveguide element due to temperature changes. An arrayed waveguide grating as an optical waveguide device comprises a flat waveguide element of specified thickness h0forming an optical waveguide layer on a silicon substrate, a first correction substrate of thickness h1 adhered to the optical waveguide layer side, and a second correction substrate of thickness h4adhered to the silicon substrate side. By properly setting the coefficients of linear expansion α1, α4and Young's moduls E1, E4of the two correction substrates, and using first and second adhesives of high rigidity, warp and expansion and contraction of the waveguide element due to temperature changes can be suppressed to minimum limit. Therefore, the optical waveguide device does not require temperature adjustment.

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