Optical waveguides – Planar optical waveguide
Patent
1991-12-11
1993-03-16
Lee, John D.
Optical waveguides
Planar optical waveguide
385 37, 385131, G02B 610
Patent
active
051951614
ABSTRACT:
Disclosed are planar waveguides comprising substantially polarization-independent Bragg gratings. A preferred embodiment of the invention comprises a Si body with a silica lower cladding layer thereon, and a phosphorus P-doped silica core on the lower cladding. Appropriate periodic recessed features are etched into the core, and phophorus P- and B-doped silica upper cladding is deposited over the core. The dopant concentrations are adjusted such that the refractive index difference between core and upper cladding is small (0.35-1.45.times.10.sup.-2), and such that the flow temperature of the upper cladding material is lower than that of the core material. In another preferred embodiment a thin layer of Si.sub.3 N.sub.x (x.about.4) is conformally deposited over the core after the grating etch, and the upper cladding material is deposited onto the Si.sub.3 N.sub.x layer. Bragg devices according to the invention are advantageously used in Integrated Optical Circuits (IOCs), e.g. in IOCs used in WDM optical communication systems.
REFERENCES:
patent: 4531809 (1985-07-01), Carter et al.
"Glass Waveguides on Silicon for Hybrid Optical Packaging", by C. H. Henry et al, Journal of Lightwave Technology, vol. 7, No. 10, Oct. 1989, pp. 1530-1539.
"Silica Waveguides on Silicon and Their Application to Integrated-Optic Components", by M. Kawachi, Optical and Quantum Electronics, vol. 22, 1990, pp. 391-416.
"Compound Bragg Reflection Filters Made by Spatial Frequency Doubling Lithography", by C. H. Henry et al, Journal of Lightwave Technology, vol. 7, No. 9, Sep. 1989, pp. 1379-1385.
"Four-Channel Wavelength Division Multiplexers and Bandpass Filters Based on Elliptical Bragg Reflectors", by C. H. Henry et al, Journal of Lightwave Technology, vol. 8, No. 5, May 1990, pp. 748-755.
Adar Renen
Henry Charles H.
Kazarinov Rudolf F.
Kistler Rodney C.
AT&T Bell Laboratories
Barns S.
Lee John D.
Pacher E. E.
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