Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1990-03-28
1991-07-30
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427162, 427272, 4273722, 4273977, C23C 1404, C23C 1414, C23C 1418, C23C 1448
Patent
active
050359169
ABSTRACT:
An optical waveguide is made by forming a layer of SiO.sub.2 on a substrate and implanting a region of the SiO.sub.2 layer with Si ions to define a region containing a stoichiometric excess of Si which defines a region having an elevated refractive index surrounded by a region having a lower refractive index. The resulting optical waveguide is stable at the high temperatures required for many semiconductor processing methods, and is useful for optical interconnection in integrated optical and optoelectronic devices.
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Boothroyd Albert R.
Ellul Joseph P.
Kalnitsky Alexander
Beck Shrive
Burke Margaret
Junkin C. W.
Northern Telecom Limited
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