Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2011-07-19
2011-07-19
Lyons, Michael A (Department: 2886)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07982882
ABSTRACT:
The relative position of a test surface is sequentially changed from a reference position where a surface central axis is aligned with a measurement optical axis such that the measurement optical axis is sequentially moved to a plurality of annular regions obtained by dividing the test surface in a diametric direction. The test surface is rotated on a rotation axis whenever the relative position is changed. Measurement light that travels while being converged by a Mirau objective interference optical system is radiated to the rotating test surface, and a one-dimensional image sensor captures interference fringes at each of a plurality of rotational positions. The shape information of each annular region is calculated on the basis of the captured interference fringes at each rotational position, and the shape information is connected to calculate the shape information of the entire measurement region.
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Lahsen Assoufid et al.; A Microstitching Interferometer for Evaluating the Surface Profile of Precisely Figured Hard X-ray K-B Mirrors, Proc. of SPIE; vol. 6704 670406-1, XP040245339.
Ge Zongtao
Kanda Hideo
Koizumi Noboru
Saito Takayuki
Birch & Stewart Kolasch & Birch, LLP
Fujinon Corporation
Hansen Jonathan M
Lyons Michael A
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