Optical type displacement measuring apparatus

Details Optical type displacement measuring apparatus Optical type displacement measuring apparatus

1988-09-08

1990-03-27

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 1, 356152, G01C 300

Patent

active

049115502

ABSTRACT:
An optical type displacement measuring apparatus according to this invention is furnished with an angle correction conversion table memory which stores therein correctional coefficients corresponding to angle signals expressive of the inclination angles of objects to-be-measured, in addition to a displacement value conversion table memory which stores therein displacement values corresponding to displacement signals, and it further comprises a head scanning unit which moves a head relative to an object to-be-measured, and an arithmetic circuit which drives the head scanning unit and which calculates an angle signal on the basis of displacement values for a plurality of points on the object to-be-measured and corrects the displacement values on the basis of correctional coefficients corresponding to this angle signal, the corrected displacement values being delivered as outputs.

REFERENCES:
patent: 4761546 (1988-08-01), Ikari et al.
patent: 4789243 (1988-12-01), Mathur
patent: 4798469 (1989-01-01), Burke
4. Constitution, No. 82 Oplus E, pp. 66-72; Sep. 1986.

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