Optical tunable filter and method of manufacturing the same

Details Optical tunable filter and method of manufacturing the same Optical tunable filter and method of manufacturing the same

2007-12-04

2007-12-04

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Light interference

Electrically or mechanically variable

C359S587000, C359S589000

Reexamination Certificate

active

11002441

ABSTRACT:
An optical tunable filter is provided including a first substrate having light transmission properties and having a movable part and a supporting member that movably supports the movable part and having a smaller thickness than the movable part, a second substrate having light transmission properties and opposed to the first substrate, a first gap and a second gap provided between the movable part and the second substrate, an interference part causing interference between the movable part and the second substrate through the second gap and a drive member changing an interval of the second gap by moving the movable part to the second substrate by making use of the first gap.

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patent: 6400738 (2002-06-01), Tucker et al.
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patent: 2003-215473 (2003-07-01), None
patent: WO 03/042729 A13 (2003-05-01), None

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