Optical tunable filter and method for manufacturing the...

Details Optical tunable filter and method for manufacturing the... Optical tunable filter and method for manufacturing the...

2006-09-12

2006-09-12

Assaf, Fayez G. (Department: 2872)

Optical: systems and elements

Light interference

Electrically or mechanically variable

C359S587000, C359S589000, C359S585000

Reexamination Certificate

active

07106514

ABSTRACT:
An optical tunable filter includes a first substrate3having a light transmitting property which includes a movable portion31, a second substrate20having a light transmitting property which is provided so as to be opposed to the first substrate, a first gap21and a second gap22which are respectively provided between the movable portion31and the second substrate20, an interference portion which causes interference of incident light between the movable portion31and the second substrate20through the second gap22, and a driving portion which changes a distance of the second gap22by displacing the movable portion31with respect to the second substrate20using the first gap21. This makes it possible to provide an optical tunable filter having a simpler structure and a smaller size, which can be manufactured through a simplified manufacturing process without using a release hole and can achieve stable driving of a movable portion, and a method for manufacturing such an optical tunable filter.

REFERENCES:
patent: 5142414 (1992-08-01), Koehler
patent: 6341039 (2002-01-01), Flanders et al.
patent: 6438149 (2002-08-01), Tayebati et al.
patent: 7012752 (2006-03-01), Choi et al.
patent: 2005/0146241 (2005-07-01), Wan
patent: 06-007100 (1994-01-01), None
patent: 321323 (2001-07-01), None
patent: 2002-174721 (2002-06-01), None

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