Optical transformer using curved strip waveguides to achieve a n

Details Optical transformer using curved strip waveguides to achieve a n Optical transformer using curved strip waveguides to achieve a n

1982-12-20

1985-07-23

Sikes, William L.

Illumination

Supported by vehicle structure

Condition responsive

350 9612, 350 9624, 350 9625, 362 32, G02B 514, G02B 516

Patent

active

045305650

ABSTRACT:
A transformer assembly particularly adapted, among other possible uses, for use in ring field illumination systems such as, for example, systems used in microlithography, said optical transformer assembly including an elongated member of glass or fused silica having a nearly circular or rectangular shape at one end for receiving a non-uniform input beam of light and through a gradual transitional intermediate section to an arcuate shape at the other end for outputting a uniformly illuminated arcuate shaped beam of light.

REFERENCES:
patent: 3255357 (1966-06-01), Kapany et al.
patent: 3489482 (1970-01-01), Brill
patent: 3562746 (1971-02-01), Aron
patent: 3800058 (1974-03-01), Bartok et al.
patent: 3933455 (1976-01-01), Chown
patent: 4151582 (1979-04-01), Grunberger
patent: 4287414 (1981-09-01), Soo et al.

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