Optical three-dimensional shape measuring apparatus having a dev

Details Optical three-dimensional shape measuring apparatus having a dev Optical three-dimensional shape measuring apparatus having a dev

1994-12-20

1996-08-20

Rosenberger, Richard A.

Optics: measuring and testing

By polarized light examination

With light attenuation

356380, 25055921, G01B 1124

Patent

active

055484050

ABSTRACT:
An apparatus for measuring a three-dimensional shape of an object to be measured provided with a fitting portion, comprises: a body base; a rotation stage set on the base; an XY stage set on the rotation stage and provided with a fitting portion, the XY stage being movable in a predetermined horizontal direction and in a horizontal direction perpendicular thereto independently of rotation of the rotation stage; a drive control device for independently driving and controlling the rotation stage and XY stage; a holding device for holding the object to be measured, the holding device being provided with a fit portion to fit with the fitting portion of the XY stage, and a fit portion to fit with the fitting portion of the object to be measured; an R stage set above the holding device, the R stage being movable in a horizontal direction and in a direction of the diameter of the rotation stage; a first optical displacement gage provided on a lower surface of the R stage so that an optical axis thereof becomes parallel to a rotational axis of the rotation stage; a Z stage provided beside the holding device, the Z stage being movable in a direction parallel to the rotational axis; and a second optical displacement gage provided on a side surface of the Z stage so that an optical axis thereof becomes perpendicular to the rotational axis of the rotation stage.

REFERENCES:
patent: 5369490 (1994-11-01), Kawai et al.

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