Optical three-dimensional shape measuring apparatus

Details Optical three-dimensional shape measuring apparatus Optical three-dimensional shape measuring apparatus

1995-01-25

1997-03-04

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

G01B 1124

Patent

active

056085290

ABSTRACT:
An optical three-dimensional shape measuring apparatus comprising an irradiating optical system for projecting a predetermined patterned image on the surface of a specimen, an observation optical system for observing the patterned image projected on the surface of the specimen and a measuring device for measuring the surface shape of the specimen based on the variation of the observed patterned image, wherein the irradiating optical system includes a focal plane dividing device for forming, along the optical axis thereof, predetermined patterned images respectively on plural focal planes.

REFERENCES:
patent: 4585349 (1986-04-01), Gross et al.
patent: 4965442 (1990-10-01), Girod et al.
patent: 5448360 (1995-09-01), Wakai et al.

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