Optical testing of surface flatness

Details Optical testing of surface flatness Optical testing of surface flatness

1977-10-31

1980-02-26

Corbin, John K.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, G01B 902

Patent

active

041903650

ABSTRACT:
Surface flatness of a machined work piece, such as a mechanical seal, is determined by placing the surface to be tested against the top surface of a horizontally-disposed "optical flat", projecting monochromatic light rays, such as from a helium lamp, downwardly onto the work piece and the optical flat, and viewing the light rays reflected from the interface of the optical flat and the surface to be tested, by use of a reflective surface placed below the optical flat.

REFERENCES:
patent: 3065663 (1962-11-01), Donnelly et al.
patent: 3891320 (1975-06-01), Kimura et al.
Edenholm et al., "A Combined Multiple--Beam and Two--Beam Microinterferometer for Surface Topography Measurements," L'Optique en Metrologie, Mollet, ed., Pergamon Press, 1960.

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