Optical technique for detecting buried defects in opaque films

Details Optical technique for detecting buried defects in opaque films Optical technique for detecting buried defects in opaque films

2006-04-11

2006-04-11

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

C356S237200

Reexamination Certificate

active

07027142

ABSTRACT:
A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

REFERENCES:
patent: 5959735 (1999-09-01), Maris et al.
patent: 2002/0135784 (2002-09-01), Morath et al.
patent: 2003/0123051 (2003-07-01), McGrew

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