Optical systems that correct optical irregularities, and...

Details Optical systems that correct optical irregularities, and... Optical systems that correct optical irregularities, and...

2004-05-06

2009-12-22

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

07636149

ABSTRACT:
An object of this invention is to reduce even slight irregularities in illumination that occur after assembly of an optical system. To this end, in an exemplary illumination-optical system, a light source that emits extreme ultraviolet (EUV) light, a collimator, a fly's-eye mirror, and a condenser are positioned, in this stated order. A prescribed illumination area on the emission side of the condenser is irradiated with Köhler illumination. At least one unit mirror, among multiple unit mirrors of the fly's-eye mirror, is a correction mirror that has reflectivity irregularities. The reflectivity irregularities correct a portion of, or all, the illumination irregularities in the illumination area.

REFERENCES:
patent: 5594526 (1997-01-01), Mori et al.
patent: 6195201 (2001-02-01), Koch et al.
patent: 6885432 (2005-04-01), Tsuji
patent: 2003/0031017 (2003-02-01), Tsuji
patent: 2000-162414 (2000-06-01), None
patent: 2000-162415 (2000-06-01), None
patent: 2001-244168 (2001-09-01), None
patent: WO00/57459 (2000-09-01), None

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