Optical system with two subsystems separately correcting odd abe

Details Optical system with two subsystems separately correcting odd abe Optical system with two subsystems separately correcting odd abe

1990-08-28

1991-10-01

Henry, Jon W.

Optical: systems and elements

Having significant infrared or ultraviolet property

Lens, lens system or component

359364, 359638, G02B 110, G02B 1708, G02B 2714, G02B 1326

Patent

active

050527630

ABSTRACT:
An optical system having a substantially flat image field is disclosed. The optical system is formed from optical subsystems wherein an input optical subsystem forms an intermediate image has a curvature which compensates that from the remaining optical components of the system to result in a substantially flat image for the optical system. Preferably the optical elements preceding the intermediate image and the optical elements succeeding the intermediate image are separately corrected for odd aberrations. The optical elements preceding the intermediate image and the optical elements succeeding the intermediate image compensate for each other and result in a substantially aberration free flat image for the optical system. The optical system preferably contains an input optical subsystem and an output optical subsystem wherein the input optical subsystem is a catadioptric system and wherein the output optical system is a dioptric system. Most preferably the input optical system is a 1X catadioptric system and the output optical system is an NX dioptric system. The optical systems of the present invention are used for subquarter micron photolithography tools for microelectronic fabrication, such as scanners and steppers.

REFERENCES:
patent: 4469414 (1984-09-01), Shafer
patent: 4854688 (1989-08-01), Hayford et al.
patent: 4896952 (1990-01-01), Rosenbluth

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