Optical system for the automatic alignment of two motifs compris

Details Optical system for the automatic alignment of two motifs compris Optical system for the automatic alignment of two motifs compris

1980-12-03

1983-09-06

Punter, William H.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356355, 356363, G01B 1127

Patent

active

044026102

ABSTRACT:
Optical system for the automatic alignment of two motifs in which the alignment marks of a first fixed motif forming the reference are constituted by at least one pair of identical periodic optical gratings with a constant spacing P and having a predetermined distance d.sub.X from one another such that the equation d.sub.X =(n+.epsilon.) P is proved, n being an integer and .epsilon. a fraction of unity.
An optical modulator, for example electro-optical means incorporating a Pockels cell alternately illuminate with the timing of the high frequency control signals, the said gratings in windows, whose position can be regulated in accordance with a given axis. The image of these windows is projected onto gratings carried on a second moving support to be aligned and produces orders of diffraction. An optoelectronic detector detects a predetermined order of diffraction. The high frequency-modulated output signals are transmitted to control circuits for producing the automatic alignment.

REFERENCES:
patent: 3541338 (1970-11-01), Duda et al.
patent: 3861798 (1975-01-01), Kobayashi et al.
patent: 4153371 (1979-05-01), Koizumi et al.
patent: 4172664 (1979-10-01), Charsky et al.
patent: 4200395 (1980-04-01), Smith et al.
G. Bouwhuis et al.: "Automatic Alignment System for Optical Projection Printing," pp. 723 to 728, IEEE Transactions on Electronic Devices, vol. ED-26, No. 4, 1979 New York (US).

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