Optical system for optical beam scanning

Details Optical system for optical beam scanning Optical system for optical beam scanning

1998-06-15

2000-02-08

Spyrou, Cassandra

Optical: systems and elements

Mirror

Plural mirrors or reflecting surfaces

359860, 359858, 359861, 359862, 359863, 359865, G02B 510, G02B 7182

Patent

active

060221151

ABSTRACT:
The present invention is directed to an optical system for measurement of a three dimensional device. The optical system is designed and configured to meet telecentric and f-.theta. requirements. The system employs primary and secondary mirrors operating in conjunction with a tertiary deflector mounted on a pivot. Light from a light source produces a beam which is deflected off the deflector and the secondary and primary reflectors respectively. The beam is then transmitted to the surface of the object to be measured. Deflection of the tertiary deflector on the pivot results in scanning of the light beam across the surface of the object to be measured.

REFERENCES:
patent: 2697379 (1954-12-01), Walker
patent: 4042933 (1977-08-01), Lapp
Proceedings of SPIE "Sensors, Sensor Systems, and Sensor Data Processing", vol. 3100--Jun. 16-17, 1997--Munich, FRG.

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