Optical system for oblique viewing

Details Optical system for oblique viewing Optical system for oblique viewing

1981-10-23

1984-01-31

Rosenberger, R. A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

35016217, 35016223, 353 70, G03B 2100

Patent

active

044286767

ABSTRACT:
An optical system for the oblique viewing of an object includes a specific embodiment for quantitatively determining the volume of solder mounds on chips and wafers without the introduction of keystone distortion and anamorphosis. The optical system includes means for directing an image of the solder mounds at an angle to a diffraction grating to provide a diffracted beam normal to the grating. The diffracted beam is then processed in a conventional manner to yield the sought-after information. In a preferred embodiment the directing means is an afocal lens system having a magnification of one.

REFERENCES:
patent: 3253505 (1966-05-01), Miller
patent: 3584948 (1971-06-01), Herriott
patent: 3787117 (1974-01-01), Watkins
IBM Technical Disclosure Bulletin, vol. 22, No. 9, Feb. 1980, p. 4068 "Inspection Technique for Solder Reflow Pad Height/Volume".

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