Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2006-04-13
2010-11-23
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
Reexamination Certificate
active
07839487
ABSTRACT:
A system and method form illumination that efficiently illuminates target areas of an object. For example, target areas can be transmission areas of a diaphragm and/or active areas of a patterning device. A plurality of beams formed by a field defining element are directed onto respective entrance faces of a plurality of rods using a relay of first and second lens arrays. The rods process the beams to form illumination that impinges substantially only within a boundary of the target areas, e.g., the transmission areas and/or the active areas. The rods are arranged in number, configuration, and cross-sectional shape corresponding to a number, configuration, and a cross-sectional shape of the target areas, e.g., the transmission areas and/or the active areas. Thus, substantially all the illumination falls within the boundary of the target areas, increasing illumination efficiency.
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Notification of Reason(s) for Refusal, Japanese Patent Application No. 2007-105001, drafted Jul. 16, 2010.
U.S. Appl. No. 12/827,490, filed Jun. 30, 2010.
ASML Holding N.V.
Kim Peter B
Liu Chia-how Michael
Sterne Kessler Goldstein & Fox P.L.L.C.
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