Optical system for focus state detection

Details Optical system for focus state detection Optical system for focus state detection

1989-03-01

1990-02-20

Perkey, W. B.

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

250201, G03B 300, G01J 120

Patent

active

049030663

ABSTRACT:
A focus state detecting optical system is provided with a condenser lens positioned in the vicinity of or behind a primary image formed by the light coming from an object and transmitted by an objective lens, pupil dividing means positioned behind the condenser lens and adapted for dividing the pupil of the condenser lens symmetrically with respect to the optical axis, and re-imaging lenses positioned parallel to and corresponding to thus divided pupils and symmetrically with respect to the optical axis thereby forming secondary images, wherein the focus state is detected from the relative positional aberration of said secondary images. Each of the re-imaging lenses is composed of a positive lens with two convex faces of which at least one is an aspherical shape.

REFERENCES:
patent: 4699493 (1987-10-01), Koyama et al.

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