Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1980-02-25
1983-02-01
Punter, William H.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
250237G, 350162R, 356363, 356400, 356401, G01B 1100, G02B 518
Patent
active
043712649
ABSTRACT:
An optical system for aligning two patterns particularly by photo-repetition in which a first pattern formed by two optical networks, disposed along two coordinate axes is illuminated by the image of a second pattern comprising two optical networks, forming a reference produced from the orders of diffraction. In a variation, the optical networks are formed from a series of parallel strokes whose thickness and spatial distribution in a first direction parallel to one of the coordinate axes are determined by a pseudo-random code; the strokes of the optical networks of the first pattern being furthermore interrupted periodically in a second direction orthogonal to the first direction so as to form an optical network with a constant pitch in this direction. The optical alignment system comprises means for detecting the intensity of a predetermined part of the orders of diffraction in the second direction.
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Torii et al., "Theory of Alignment Monitoring By Diffraction from Superimposed Dual Gratings", J. Opt. Soc. Am., vol. 68, 12-1978, pp. 1716-1731.
Torii et al., "Theory of Alignment Monitoring by Diffraction from Superimposed Dual Gratings", J. Opt. Soc. Am., vol. 68, 12-1978, pp. 1716-1731.
Gale, B., "The Theory of Variable Spacing Gratings", Optica Acta, 1966, pp. 41-54.
Dubroeucq Georges
Lacombat Michel
"Thomson-CSF"
Punter William H.
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