Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-06-21
2011-06-21
Glick, Edward J (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S030000, C355S053000
Reexamination Certificate
active
07965378
ABSTRACT:
An illuminator for a lithography system is provided. The illuminator includes a mask positioned along an optical axis and first and second refractive groupings positioned along the axis in cooperative arrangement with the mask. Also included are first and second reflecting devices for reflecting an image output from the first and second refractive groupings and a spatial light modulator (SLM) positioned along the axis in cooperative arrangement with the first and second reflecting devices. The active areas of the mask and the SLM are positioned off-axis.
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Smirnov Stanislav Y.
Sobolev Kirill Y.
Asfaw Mesfin T
ASML Holding N.V
Glick Edward J
Sterne Kessler Goldstein & Fox P.L.L.C.
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