Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-01-18
2005-01-18
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C359S490020, C359S754000
Reexamination Certificate
active
06844915
ABSTRACT:
An optical system attains good optical performance without substantially receiving the effects of birefringence even when using an optical material having intrinsic birefringence. An optical system that includes at least one radiation transmissive member that transmits light having a wavelength of 200 nm or less has an optical axis that substantially coincides with a crystal axis [100] or a crystal axis optically equivalent to the crystal axis [100]. In addition, an optical system can include: a first group of radiation transmissive members that transmits light having a wavelength of 200 nm or less and having an optical axis that substantially coincides with a crystal axis [100] or a crystal axis optically equivalent to the crystal axis [100]; and a second group of radiation transmissive members that transmits light having a wavelength of 200 nm or less and having an optical axis that substantially coincides with a crystal axis [100] or a crystal axis optically equivalent to the crystal axis [100]; wherein the first group of radiation transmissive members and the second group of radiation transmissive members have a positional relationship rotated substantially 45° about the optical axis relative to each other.
REFERENCES:
patent: 5969802 (1999-10-01), Takahashi et al.
patent: 6122107 (2000-09-01), Koch et al.
patent: 6137626 (2000-10-01), Takaoka
patent: 6195213 (2001-02-01), Omura et al.
patent: 6201634 (2001-03-01), Sakuma et al.
patent: 6366404 (2002-04-01), Hiraiwa et al.
patent: 20030000453 (2003-01-01), Unno et al.
patent: 20030011893 (2003-01-01), Shiraishi et al.
patent: 20030011896 (2003-01-01), Shiraishi
patent: 20030012724 (2003-01-01), Burnett et al.
patent: 20030021026 (2003-01-01), Allan et al.
patent: 20030053036 (2003-03-01), Fujishima et al.
patent: 20030058421 (2003-03-01), Omura et al.
patent: 20030099047 (2003-05-01), Hoffman et al.
patent: 1 063 684 (2000-12-01), None
patent: 1 114 802 (2001-07-01), None
patent: A-8-107060 (1996-04-01), None
patent: A-11-54411 (1999-02-01), None
patent: A-2000-331927 (2000-11-01), None
patent: 2000-331927 (2002-11-01), None
patent: WO 02093209 (2002-11-01), None
patent: WO 02093257 (2002-11-01), None
patent: WO 03009021 (2003-01-01), None
patent: WO 03009062 (2003-01-01), None
Birefringence of CaF2, Kurt Nattermann, International SEMA Tech Calcium Fluoride Birefringence Work Shop, Jul. 2001.
Intrinsic birefringence in calcium fluoride and barium fluoride, Physical Review B, vol. 64, 241102(R), John H. Burnett et al., Nov. 29, 2001.
English-language translation of JP-A-11-54411.
Burnett et al., “Intrinsic Birefringence in 157 nm Materials”, 2ndInternational Symposium, National Institute of Standards and Technology, 2001.
Omura Yasuhiro
Owa Soichi
Shiraishi Naomasa
Tanaka Issey
Mathews Alan
Nikon Corporation
Oliff & Berridg,e PLC
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