Optical system alignment system and method with high...

Details Optical system alignment system and method with high... Optical system alignment system and method with high...

2007-05-29

2007-05-29

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000

Reexamination Certificate

active

10938954

ABSTRACT:
A system for aligning of optical components includes an interferometer and a first diffractive alignment element. A housing is used for positioning a first optical element being aligned. A detector is used for detecting fringes produced by reflections off surfaces of the first optical element. A grating pattern on the first diffractive alignment element is designed to produce a retro-reflected wavefront or a wavefront transmitted or reflected in a predetermined direction when the first optical element is in alignment. The first diffractive alignment element includes a first region for alignment of the interferometer, a second region for alignment of one surface of the first optical element, and a third region for alignment of another surface of the first optical element. The first, second and third regions can be of any shape such as circular, rectangular, triangular, or the like.

REFERENCES:
patent: 5638169 (1997-06-01), Hollmann et al.
patent: 6930783 (2005-08-01), Kim
“Alignment CGHs”, Diffraction International Ltd., 1997-2003, retrieved from the Internet on Feb. 15, 2005 : <URL:http://www.diffraction.com/HA50.html>, pp. 1-3 and pp. 1.
Sixt, P., “Phase Masks and Grey-Tone Masks”, Litomask by CSEM, retrieved from the Internet on Feb. 15, 2005 :<URL:http://www.semiconductorfabtech.com/features/lithography/articles/2.209.shtml> pp. 1-11.
Kumler, J. et al. “Alignment Technique for Optical Assemblies”, Coastal Optical Systems, Inc., pp. 1-10.
“Laser Alignment and Assembly Station: Model LAS-001 User Manual P/N 900100”, Opto-Alignment Technology, Rochester, NY, Rev. B., Mar. 1998.
Chapman et al., “Alignment of a ring-field EUV projection optics system visible-light interferometry”, Lawrence Livermore National Laboratory, Livermore, CA, 2000.
“T.I.R. Gages—Air Bearing Spin: Table Ultra-Precision T.I.R. Measurements”, IBTech, Inc., http://www.abtechmfg.com/tir.html, 2003, last viewed Dec. 12, 2006.
Search Report, dated Oct. 18, 2006, for International Application No. PCT/US05/09258, 9 pages.

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