Optical system

Details Optical system Optical system

1981-08-06

1983-06-21

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Photographing on both sides of photo-sensitive paper

350292, 355 67, G03B 2732, G03B 2752

Patent

active

043891152

ABSTRACT:
Optical system provides a uniform, well-collimated beam particularly for the exposure of photoresist on integrated circuit boards. The well-collimated beam is produced in a short beam path through the use of a series of mirrors, including concave mirrors and an integrator mirror to produce reliable exposure characteristics at the exposure focal plane. Preferably, a beam splitter is provided so that the focal plane is illuminated on both sides for concurrent exposure of both sides of the board.

REFERENCES:
patent: 3479118 (1969-11-01), Paige
patent: 3531198 (1970-09-01), Delp
patent: 3624724 (1971-11-01), Sheffer
patent: 3885871 (1975-05-01), Galatha et al.
patent: 4195913 (1980-04-01), Dourte et al.
patent: 4241392 (1980-12-01), Boone
patent: 4289380 (1981-09-01), Tucker

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