Optical switching element and method for manufacturing the same

Details Optical switching element and method for manufacturing the same Optical switching element and method for manufacturing the same

2005-09-27

2005-09-27

Bovernick, Rodney (Department: 2874)

Optical waveguides

Planar optical waveguide

C385S014000

Reexamination Certificate

active

06950589

ABSTRACT:
A lower clad, cores, and an upper clad are formed by a chemical vapor deposition method (CVD method). At least one of the additional amount of oxygen, the additional amount of nitrogen, and the additional amount of silicon of a silicon oxynitride film is adjusted so that the cores have a desired higher refractive index than those of the clads. Further, end point detectors are formed which become etching stoppers of dry etching in pattern forming the cores.

REFERENCES:
patent: 5827370 (1998-10-01), Gu
patent: 6020111 (2000-02-01), Mihara
patent: 6194036 (2001-02-01), Babayan et al.
patent: 6580864 (2003-06-01), Temkin et al.
patent: 6730988 (2004-05-01), Leon et al.
patent: 6768828 (2004-07-01), Gill et al.
patent: 6768855 (2004-07-01), Bakke et al.
patent: 2003/0118309 (2003-06-01), Uno
patent: 2003/0176002 (2003-09-01), Zhang et al.
patent: 2004/0042751 (2004-03-01), Blalock et al.
patent: 09080247 (1997-03-01), None
R. M. de Ridder et al. Silicon oxynitride planar waveguiding structures for application in optical communication. IEEE Journal of Selected Topics in Quantum Electronics, vol.4 No. 6, pp. 930-937, Nov./Dec. 1998.
E. Fluck et al. Compact versatile thermooptical space switch based on beam steering by a waveguide array. IEEE Photonics Technology Letters, vol. 11 No. 11, pp. 1399-1401, Nov. 1999.
B. J. Offrein et al. Tunable WDM add/drop components in silicon-oxynitride waveguide technology. 1999 Electronic Components and Technology Conference, pp. 19-25, Jun. 1999.
I. Shubin et al. Electrostatically actuated 1×2 micro-mechanical optic switch. Electronics Letters, vol. 37 No. 7, pp. 451-452, Mar. 2001.

Affiliated with

Also associated with

Rating

Optical switching element and method for manufacturing the same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical switching element and method for manufacturing the same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical switching element and method for manufacturing the same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3449219