Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2006-01-31
2006-01-31
Healy, Brian (Department: 2883)
Optical waveguides
With optical coupler
Switch
C385S014000, C385S015000, C385S052000, C438S031000
Reexamination Certificate
active
06993215
ABSTRACT:
A method for making an optical structure and a multilayer optical structure provided with optical guide elements for transmitting at least a light wave, comprises: providing a substrate with a first and second layer; etching out in the second electrically conducting layer a groove having two opposite ends and partly enclosing a first zone of the layer; filling the groove with electrically insulating material; etching out a cavity in the second layer then in the first non-electrically conducting layer partly enclosing a second zone of the second layer, adjacent to or extending the first zone wherein emerges the groove; the cavity comprises a clearance in the second layer; such that the closed part of the second layer corresponding to the zones is electrically isolated from the rest of the layer and the cleared part beneath the second zone constitutes a beam.
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T T H Eng et al.: “Voltage-Controlled Micromechanical SOI Optical Waveguides” 1995 IEEE Tencon. IEEE Region Ten International Conference On Microelectronics and VLSI. (TENCON), New York, IEEE, US, Nov. 6, 1995, pp. 195-197, XP000585775, ISBN: 0-7803-2625-3.
T T H Eng et al.“ Surface-micromachined epitaxial silicon cantilevers as movable optical waveguides on silicon-on-insulator substrates”, Sensors and Actuators A, Elsevier Sequoia S.A., Lausanne, CH, vol. 49, No. 1-2, Jun. 1995, pp. 109-113, XP004303630, ISSN: 0924-4247.
Healy Brian
Kalivoda Christopher M.
Opsitech--Optical System on a Chip
Young & Thompson
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