Optical switch device

Optical waveguides – With optical coupler – Switch

Reexamination Certificate

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Details

C385S016000, C385S017000, C359S872000, C359S877000

Reexamination Certificate

active

06912336

ABSTRACT:
An optical switch device includes at least an optical switch element and driving control circuit. In the optical switch element, a fixed electrode portion is arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed. A mirror structure has a plate-shaped movable portion arranged above the fixed electrode portion while opposing the fixed electrode portion. A reflecting portion is formed at least at part of the movable portion to reflect light. A support member is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.

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patent: 0614101 (1994-02-01), None
patent: 08-122689 (1996-05-01), None
patent: WO 98/09279 (1998-03-01), None

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