Optical waveguides – With optical coupler – Switch
Reexamination Certificate
2005-06-28
2005-06-28
Ullah, Akm Enayet (Department: 2874)
Optical waveguides
With optical coupler
Switch
C385S016000, C385S017000, C359S872000, C359S877000
Reexamination Certificate
active
06912336
ABSTRACT:
An optical switch device includes at least an optical switch element and driving control circuit. In the optical switch element, a fixed electrode portion is arranged, via a dielectric layer, on a semiconductor substrate on which an integrated circuit is formed. A mirror structure has a plate-shaped movable portion arranged above the fixed electrode portion while opposing the fixed electrode portion. A reflecting portion is formed at least at part of the movable portion to reflect light. A support member is fixed around the fixed electrode portion on the semiconductor substrate via a dielectric layer and supports the mirror structure. The driving control circuit is incorporated in the integrated circuit to drive the optical switch element by applying a predetermined potential to the movable portion and fixed electrode portion.
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Ishii Hiromu
Kiyokura Takanori
Machida Katsuyuki
Shimamura Toshishige
Tanabe Yasuyuki
Blakely & Sokoloff, Taylor & Zafman
Nippon Telegraph and Telephone Corporation
Petkevsek Daniel
Ullah Akm Enayet
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