Optical switch

Details Optical switch Optical switch

2006-09-05

2006-09-05

Pak, Sung (Department: 2874)

Optical waveguides

With optical coupler

Switch

C359S224200

Reexamination Certificate

active

07103243

ABSTRACT:
There is provided an optical switch that can be easily manufactured and has hardly any optical loss. A movable board-like electrode disposed in parallel with a fixed board-like electrode with a predetermined space therebetween by a flexible beam-like element, at least two mirrors fabricated on the surface of the movable board-like electrode, and at least three V-shaped grooves for fixing optical fibers are concurrently fabricated by applying an anisotropic etching to a single crystal silicon having its surface of (100) crystal face. In this case, two opposed mirrors are fabricated such that their mirror surfaces form a right angle, and two parallel V-shaped grooves are formed at positions opposed to the mirror surfaces at an angle of 45° thereto. An output side and an input side optical fibers are received and fixed in one of the two V-shaped grooves and the other groove, respectively.

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Imaki, O., et al., “Study of (2×2) x N optical switch by micromachine technology” C-3-82, Central Research Laboratory, Japan Aviation Electronics Industry, Ltd. 2000. p. 208.
Hélin, P., et al., “Self aligned vertical mirrors and V-grooves applied to a self-latching matrix switch for optical n etworks” 13th Annual Int'l. Conf. on Micro Electro Mechanical Systems (MEMS 2000), IEEE, 2000, pp. 467-472.
Imaki, “Study of (2×2) x N optical switch by micromachine technology” Institute of Electronics, Information and Communication Engineers, Tsushin Society Taikai Koen Ronbunshuu, 2000, p. 208, XP002956680.

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