Optical surface proximity measuring device and its application t

Details Optical surface proximity measuring device and its application t Optical surface proximity measuring device and its application t

1985-02-26

1987-01-27

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356 4, 356375, G01B 1124

Patent

active

046391401

ABSTRACT:
The invention relates to an optical device for measuring the surface proximity and to its application in the plotting of a profile.
The device comprises a radiation emitter forming a light spot on the surface and two detectors, which are sensitive to the light flux reflected by the surface. A pair of focusing elements having different focal lengths are associated with the detectors. The ratio between the signals supplied by the detectors is determined by a processing circuit. This ratio is used to calculate the distance independently of the angle of incidence of the incident beam and the reflection coefficient of the surface.

REFERENCES:
patent: 3719421 (1973-03-01), Poilleux et al.
patent: 3885872 (1975-05-01), Howe, Jr. et al.
patent: 3986774 (1976-10-01), Lowrey, Jr. et al.
patent: 4088408 (1978-05-01), Burcher et al.
patent: 4298286 (1981-11-01), Maxey et al.
patent: 4355904 (1982-10-01), Balasubramanian
patent: 4548504 (1985-10-01), Morander

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