Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1996-03-14
1997-08-26
Turner, Samuel A.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, 356374, G01B 902
Patent
active
056615590
ABSTRACT:
An automatic surface inspection apparatus comprises a light source that provides a coherent light beam that is spit and then recombined in a prism to generate an interference pattern. A cylindrical lens projects the interference pattern onto the surface of a disk as a line of light. A linear detection array converts the reflected line of light into an electrical signal that has a magnitude which varies dependent upon the reflected light intensity. Defects present on the surface of the disk cause variations in the reflected light intensity manifested as differences in the electrical signal output by the detection array.
REFERENCES:
patent: 3218916 (1965-11-01), Saunders
patent: 4794550 (1988-12-01), Greivenkamp
patent: 4948251 (1990-08-01), Kondo
Brezoczky Blasius
Pogrebinsky Vladimir
Phase Metrics, Inc.
Turner Samuel A.
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