Optical structure for adjusting the peak power of a laser beam

Details Optical structure for adjusting the peak power of a laser beam Optical structure for adjusting the peak power of a laser beam

1993-01-28

1994-05-24

Bovernick, Rodney B.

Coherent light generators

Particular beam control device

Control of pulse characteristics

372 99, 372700, 21912176, G01B 902

Patent

active

053156048

ABSTRACT:
Structure is disclosed for the ablation of material by the use of a laser beam wherein the laser provides a beam which is directed through an illumination and projection optical system for imaging on the material which is to be ablated. In the present invention the peak power of the laser beam is adjustable. The laser beam peak power adjustment structure includes a laser that provides a pulsed beam. The laser beam is directed into a beam splitter wherein the laser beam is split into two beam components. The first beam component passes through beam splitter with negligible or no delay, then passes through a quarter waveplate and impinges on a first mirror which reflects it back to the beam splitter. The second beam component is directed at an angle of 90 degrees by the beam splitter and toward a second mirror. The second mirror is at a predetermined distance from the beam splitter which introduces a total predetermined delay for the reflected second beam component as it is directed back to the beam splitter. The reflected first beam component and the delayed reflected second beam component are combined at the beam splitter to form a third beam which passes from the beam splitter toward the conventional optical column for the ablation tool including the mask and target. The resultant third beam directed to the mask therefore consists of original beam pulses and delayed beam pulses which combine to reduce the peak power of the third beam component.

REFERENCES:
patent: 3463924 (1969-08-01), Culshaw et al.
patent: 3464026 (1969-08-01), Woodbury et al.
patent: 3700334 (1972-10-01), Low et al.
patent: 3881823 (1973-05-01), De Lang et al.
patent: 4059759 (1977-11-01), Harney et al.
patent: 4114018 (1978-09-01), Von Allmen et al.
patent: 4180324 (1979-12-01), Primbsch
patent: 4188122 (1980-02-01), Massie et al.
patent: 4224096 (1980-09-01), Osborne
patent: 4335939 (1982-06-01), Stovell et al.
patent: 4632556 (1986-12-01), Akatsu
patent: 4752668 (1988-06-01), Rosenfield et al.
patent: 4776699 (1988-10-01), Yoshizumi
patent: 4925523 (1990-05-01), Braren et al.
"Introduction to Lasers and Their Applications", O'Shea et al., 1977, pp. 36-39.

Affiliated with

Also associated with

Rating

Optical structure for adjusting the peak power of a laser beam does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Optical structure for adjusting the peak power of a laser beam, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Optical structure for adjusting the peak power of a laser beam will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1978990