Optical sensor with telecentric optics

Details Optical sensor with telecentric optics Optical sensor with telecentric optics

1999-08-30

2000-11-21

Pham, Hoa Q.

Optics: measuring and testing

By polarized light examination

With light attenuation

356431, 25055929, 25055936, G01B 1114

Patent

active

06151117&

ABSTRACT:
A substrate sensor system having a light source for radiating light toward a substrate position, a light sensor system positioned to receive light transmitted or reflected at the substrate, a lens that images the light transmitted or reflected at the substrate onto the light sensor system, and a telecentric stop between the lens and the light sensor system. Beneficially, such substrate sensor systems will include an electrical circuit that produces position information regarding the position of a substrate and/or the position of an image on a substrate.

REFERENCES:
patent: 3782834 (1974-01-01), Fujimori et al.
patent: 5008743 (1991-04-01), Katzir et al.
patent: 5138178 (1992-08-01), Wong et al.
patent: 5897611 (1999-04-01), Case et al.
Article--The Telecentric Stop, Example of Telecentric Optical System, Modern Optical Engineering by Warren Smith, p. 131.

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