Optical sensor having a wave guide substrate with interferometer

Details Optical sensor having a wave guide substrate with interferometer Optical sensor having a wave guide substrate with interferometer

1991-10-18

1993-11-16

Turner, Samuel A.

Optics: measuring and testing

By particle light scattering

With photocell detection

356361, 385 12, G01B 902

Patent

active

052628426

ABSTRACT:
A sensor for detecting substances including hydrocarbons includes an integrated optical interferometer in the form of a Mach-Zehnder interferometer having a measuring arm and a comparison arm in a wave guide substrate. A polymer such as polysiloxane is applied as a superstrate to the wave guide in the region of the measuring arm. This superstrate can be penetrated by the substance to be detected. Swelling response, gas absorption, refractive index of the polymer and doping with chromophores or fluorophores, layer thickness and layer length are all parameters which can be adapted for a substance-selective performance. Other means of selection include various superstrates on a number of interferometers mounted parallel on a chip and polychrome measurements in combination with methods of pattern recognition constitute further means of selection.

REFERENCES:
patent: 4712865 (1987-12-01), Hsu et al.
patent: 4842783 (1989-06-01), Blaylock
patent: 4936645 (1990-06-01), Yoon et al.
patent: 4940328 (1990-07-01), Hartman
patent: 4969711 (1990-11-01), Rogler et al.
patent: 5004914 (1991-04-01), Vali et al.
patent: 5073024 (1991-12-01), Valette et al.
"Integrated optical components in substrate glasses" by Ludwig Ross, Glash. Ber. 62 (1989) Nr. 8, pp. 285 to 297.

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