Optical sensor circuit combining functions of open and close...

Details Optical sensor circuit combining functions of open and close... Optical sensor circuit combining functions of open and close...

2007-08-14

2007-08-14

Luu, Thanh X. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

Signal isolator

C250S2140RC, C250S2140SW

Reexamination Certificate

active

11264173

ABSTRACT:
An optical sensor circuit comprises an optical sensor adapted to sense a position of a component in a semiconductor manufacturing apparatus according to the presence or absence of a flag and output a signal indicative of the position. A position sensing driver receives the signal via a path selected by a plurality of switches and then drives an output signal in response to the signal. The path selected by the plurality of switches causes the optical sensor circuit to act as either a close-type optical sensor circuit or an open-type optical sensor circuit.

REFERENCES:
patent: 5117118 (1992-05-01), Fukuyama
patent: 5175487 (1992-12-01), Inoue
patent: 5252820 (1993-10-01), Shinomiya
patent: 5258823 (1993-11-01), Akamatsu
patent: 5707893 (1998-01-01), Bhatt et al.
patent: 5734170 (1998-03-01), Ikeda
patent: 2003/0174238 (2003-09-01), Wu
patent: 2004/0179209 (2004-09-01), Besch

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