Optical sensor and optical apparatus using the same

Details Optical sensor and optical apparatus using the same Optical sensor and optical apparatus using the same

1996-03-11

1997-09-02

Nelms, David C.

Optics: measuring and testing

By polarized light examination

With light attenuation

356373, 250237G, 25055937, 2502221, G01B 1124

Patent

active

056637969

ABSTRACT:
In an optical apparatus utilizing moire fringes to inspect surface irregularities of a test object, a single light beam forms a light beam network in an optical sensor (28) such that the test object can be two-dimensionally detected, thereby preventing the test object from abnormally approaching a moire grating (12). The light beam is reflected between a pair of mirrors (50, 52) a plurality of times within an identical plane and then the optical sensor (28) detects the intensity of the light beam. The optical sensor (28) is disposed such that the light beam network is positioned directly below the moire grating (12). Accordingly, a test object (2) abnormally approaching the moire grating (12) can be two-dimensionally detected by the light beam network, thereby improving the accuracy in detection.

REFERENCES:
patent: 3524066 (1970-08-01), Blakkan
patent: 3677652 (1972-07-01), Little
patent: 4792678 (1988-12-01), Spies
patent: 5485276 (1996-01-01), Bien et al.

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