Optical sensing systems

Details Optical sensing systems Optical sensing systems

1990-12-18

1992-10-06

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

Vibration type

73705, 25023119, G01L 900, G01L 1100

Patent

active

051521733

ABSTRACT:
In an optically-excited micromachined silicon pressure sensor comprising a resonantly vibrating beam mounted on a diaphragm, vibration of the beam is sensed optically via the same optical fibre through which the optical excitation signal is applied to the sensor. The end of the fibre and the beam are arranged to define a cavity or gap whose width varies with vibration of the beam and which behaves as a Fabry-Perot cavity: thus light from the fibre is directed onto the beam and then reflected back to the fibre, the reflected light being modulated at the frequency of vibration of the beam. In order to overcome the difficulty of setting the gap or cavity width at an optimum value for light of a given wavelength, light of two different wavelengths is used to sense the vibrations, the wavelengths being selected such that the phase difference produced by the gap for one wavelength differs from that for the other wavelength by roughly 90.degree..

REFERENCES:
patent: 4897542 (1990-01-01), Dakin et al.
patent: 4933545 (1990-06-01), Saaski et al.
patent: 4972076 (1990-11-01), Willson

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