Optical semiconductor device and method of fabricating the same

Details Optical semiconductor device and method of fabricating the same Optical semiconductor device and method of fabricating the same

1997-11-20

1999-05-04

Ullah, Akm E.

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

G02B 610

Patent

active

059012650

ABSTRACT:
This invention provides an optical semiconductor device including a semiconductor substrate having a mesa stripe in which at least an optical waveguide layer is formed, a major surface of the semiconductor substrate being a crystal plane, a semiconductor buried layer formed on the two side surfaces of the mesa stripe, and a stripe cladding layer formed on the mesa stripe region and the semiconductor buried layer and having a shape whose section is substantially trapezoidal and whose side surfaces are crystal planes.

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patent: 5561682 (1996-10-01), Aoki et al.
patent: 5604762 (1997-02-01), Morinaga et al.
patent: 5737474 (1998-04-01), Aoki et al.
patent: 5784183 (1998-07-01), Aoki et al.

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