Optical semiconductor component and method of fabrication

Details Optical semiconductor component and method of fabrication Optical semiconductor component and method of fabrication

1996-05-28

1999-08-10

Crane, Sara

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

257415, 7351419, 7351424, 7351426, 73777, H01L 3100

Patent

active

059362944

ABSTRACT:
An optical semiconductor component (10) includes a substrate (11) having a surface (12), a photodetector (13) supported by the substrate (11), and a seismic mass (21) overlying the surface (12) of the substrate (11) and overlying a portion of the photodetector (13). The seismic mass (21) has a hole (22) overlying a base region (32) of the photodetector (13) wherein the seismic mass (21) is movable relative to the substrate (11) and the photodetector (13).

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Ebrahim Abbaspour-Sani et al., "A Novel Optical Accelerometer", IEEE Electron Device Letters, vol. 16, No. 5, May 1995, pp. 166-168.
N.C. Tien, et al. "Impact-actuated linear microvibromotor for micro-optical systems on silicon", IEDM, 1994, pp. 6.7.1-6.7.3.
William Nunley et al., Infrared Optoelectronics Devices and Applications, "Mechanical Considerations" 1987, Chapter 11, pp. 184-189.

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