Optical scatterometer having improved sensitivity and bandwidth

Details Optical scatterometer having improved sensitivity and bandwidth Optical scatterometer having improved sensitivity and bandwidth

1985-08-20

1987-12-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356445, G01N 2186

Patent

active

047106425

ABSTRACT:
An improved optical scatterometer includes a multiple detector array that enables the measurement of sample microstructure over an increased range of spatial frequency. One array of optical detectors is positioned in a plane perpendicular to the plane containing an incident laser beam and a specularly reflected beam to detect indications of back-scattered and forward-scattered light in that perpendicular plane. Two laser beams having different wavelengths may be employed to determine the optical characteristics of a film and an underlying substrate.

REFERENCES:
patent: 3922093 (1975-11-01), Dandliker et al.
patent: 4364663 (1982-12-01), Gardner et al.
patent: 4555635 (1985-11-01), Yoshida

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