Optical scanning using vibratory diffraction gratings

Details Optical scanning using vibratory diffraction gratings Optical scanning using vibratory diffraction gratings

2004-12-23

2009-06-02

Mullins, Burton (Department: 2834)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C348S205000, C310S309000, C359S198100

Reexamination Certificate

active

07542188

ABSTRACT:
An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that connects the mass platform to at least one fixed support, and at least one driving actuator that drives the mass platform into an in-plane vibratory motion which can be rotational and/or translational. The apparatus may also be formed by a mass platform having at least one diffraction grating formed thereon as the scanning element, at least one driving actuator connected to the mass platform through at least one flexure structure. The driving actuator drives the mass platform into an in-plane vibratory motion.

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