Optical scanning system for surface inspection

Details Optical scanning system for surface inspection Optical scanning system for surface inspection

2005-05-03

2005-05-03

Rosenberger, Richard A. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

06888627

ABSTRACT:
In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface. Different defect maps provided by the output of the detectors can be compared to identify and classify the defects. The imaging function of the array of sensors combines the advantages of a scanning system and an imaging system while improving signal/background ratio of the system.

REFERENCES:
patent: 3851951 (1974-12-01), Eveleth
patent: 4230940 (1980-10-01), Minami et al.
patent: 4240442 (1980-12-01), Andresen et al.
patent: 4277178 (1981-07-01), Cushing et al.
patent: 4306808 (1981-12-01), Vander Neut
patent: 4376583 (1983-03-01), Alford et al.
patent: 4378159 (1983-03-01), Galbraith
patent: 4391524 (1983-07-01), Steigmeier et al.
patent: 4405238 (1983-09-01), Grobman et al.
patent: 4441124 (1984-04-01), Heebner et al.
patent: 4526468 (1985-07-01), Steigmeier et al.
patent: 4556290 (1985-12-01), Roulot
patent: 4589773 (1986-05-01), Ido et al.
patent: 4598997 (1986-07-01), Steigmeier et al.
patent: 4601576 (1986-07-01), Galbraith
patent: 4614427 (1986-09-01), Koizumi et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4676637 (1987-06-01), Uto et al.
patent: 4728190 (1988-03-01), Knollenberg
patent: 4740708 (1988-04-01), Batchelder
patent: 4748333 (1988-05-01), Mizutani et al.
patent: 4752898 (1988-06-01), Koenig
patent: 4766324 (1988-08-01), Saadat et al.
patent: 4772126 (1988-09-01), Allemand et al.
patent: 4786815 (1988-11-01), Walker et al.
patent: 4794264 (1988-12-01), Quackenbos et al.
patent: 4800268 (1989-01-01), Miyoshi et al.
patent: 4844617 (1989-07-01), Kelderman et al.
patent: 4864123 (1989-09-01), Mizutani et al.
patent: 4864147 (1989-09-01), Ikari et al.
patent: 4889998 (1989-12-01), Hayano et al.
patent: 4895446 (1990-01-01), Maldari et al.
patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 4899055 (1990-02-01), Adams
patent: 4912487 (1990-03-01), Porter et al.
patent: 4936676 (1990-06-01), Stauffer
patent: 4966455 (1990-10-01), Avni et al.
patent: 4966457 (1990-10-01), Hayano et al.
patent: 4998019 (1991-03-01), Stokowski et al.
patent: 4999510 (1991-03-01), Hayano et al.
patent: 5004929 (1991-04-01), Kakinoki et al.
patent: 5027132 (1991-06-01), Manns et al.
patent: 5076692 (1991-12-01), Neukermans et al.
patent: 5083035 (1992-01-01), Pecen et al.
patent: 5092557 (1992-03-01), Sawatzki
patent: 5122898 (1992-06-01), Picault
patent: 5125741 (1992-06-01), Okada et al.
patent: RE33991 (1992-07-01), Shiba et al.
patent: 5133635 (1992-07-01), Malin et al.
patent: 5162642 (1992-11-01), Akamatsu et al.
patent: 5166516 (1992-11-01), Kajimura
patent: 5168386 (1992-12-01), Galbraith
patent: 5189481 (1993-02-01), Jann et al.
patent: 5241366 (1993-08-01), Bevis et al.
patent: 5264912 (1993-11-01), Vaught et al.
patent: 5272517 (1993-12-01), Tokura
patent: 5274434 (1993-12-01), Morioka et al.
patent: 5317380 (1994-05-01), Allemand
patent: 5363187 (1994-11-01), Hagiwara et al.
patent: 5436464 (1995-07-01), Hayano et al.
patent: 5461474 (1995-10-01), Yoshii et al.
patent: 5479252 (1995-12-01), Worster et al.
patent: 5530550 (1996-06-01), Nikoonahad et al.
patent: 5576831 (1996-11-01), Nikoonahad et al.
patent: 5633747 (1997-05-01), Nikoonahad et al.
patent: 5659390 (1997-08-01), Danko
patent: 5667353 (1997-09-01), Drake
patent: 5699447 (1997-12-01), Alumot et al.
patent: 5712701 (1998-01-01), Clementi et al.
patent: 5742422 (1998-04-01), Drake
patent: 5767962 (1998-06-01), Suzuki et al.
patent: 5805278 (1998-09-01), Danko
patent: 5883710 (1999-03-01), Nikoonahad et al.
patent: 5888710 (1999-03-01), Adachi et al.
patent: 5903342 (1999-05-01), Yatsugake et al.
patent: 6081325 (2000-06-01), Leslie et al.
patent: 6118525 (2000-09-01), Fossey et al.
patent: 6215551 (2001-04-01), Nikoonahad et al.
patent: 6292259 (2001-09-01), Fossey et al.
patent: 065051 (1981-12-01), None
patent: 0398781 (1990-11-01), None
patent: 62-128135 (1987-06-01), None
patent: 62-153737 (1987-07-01), None
patent: 62-274633 (1987-11-01), None
patent: 63-73635 (1988-04-01), None
patent: 63-284455 (1988-11-01), None
patent: 2-78936 (1990-03-01), None
patent: 2-87047 (1990-03-01), None
patent: 3-225939 (1991-10-01), None
patent: 5-332946 (1993-12-01), None
patent: 6-34559 (1994-02-01), None
patent: 62-174655 (1994-06-01), None
patent: 96-18093 (1996-06-01), None
“Accoustoopic Scanners and Modulators,” Gottleib, M. Optical Scanning, ed. By G.F. Marshall, Dekker 1991, pp. 615-685.
“Dual Sensor Technology for High-Speed Detection of 0.1, Micron Defects.” Alumot, D. et al., SPIE, vol. 1926, Integrated Circuit Metrology, Inspection and Process Control VII, 1193, pp. 1-12.
“New Laser Scanning Techniques for Wafer Inspection,” M. Nikoonahad, SPIE, vol. 2638, Feb. 1995, pp. 285-301.
“Inspection of Patterned Wafers: 0.35 μm Design Rules and Beyond,” J. R. Dralla, presented at Semicon Kansai, Jun. 15-17, 1994, pp. 1-8.
“Dynamic Performance of a Scanning X-Y Stage for Automated Electron-beam Inspection,” D. J. Clark et al., J. Vac. Sci. Technol. B. vol. 10, No. 6, Nov./Dec. 1992, pp. 2638-2642.
“A Stand-Alone Scanning Force and Friction Microscope,” M. Hipp et al. Ultramicroscopy, 42-44, 1992, pp. 1498-1503**.
“Experimental Scattering Investigations and Radiative Transfer Calculations of Large Arbitrarily Shaped Absorbing Particles,” C. Sasse, SPIE Optical Scattering, vol. 1995, 1993, pp. 294-299**.
“Meeting the Challenges of Unpatterned Wafer Inspection for 130nm Device Geometries,” H. Altendorfer et al., Silicon Wafer Symposium, SEMI 1998, pp. K-1-K-8**.
“COPs/Particles Discrimination with a Surface Scanning Inspection System,” M. Akbulut et al., Semiconductor International, Apr. 1999, pp. 1-6**.
“Comparison of Models and Measurements of Scatter from Surface Bound Particles,” C.A. Scheer et al. SPIE, vol. 3275, pp. 102-111**.
“Comparison of Measured and Modeled Scatter from Defects and Particles on Silicon Wafers,” J.C. Stover et al., Electromagnetic and Light Scattering: Theory and Applications, Workshop 1997, pp. 109-118**.
“Experimental Verification of Discrete Sources Method in Problem of Light Scattering From Particle Upon Wafer Surface,” pp. 1-6 with 6 sheets of figures**.
“Response of a Wafer Surface Scanner to Non-Ideal, Real World Particles,” S. Chae et al., Particle Technology Laboratory Publication No. 820, Jan. 1992, 10 pages**.
“Using Calibration Curve Modeling for Scanning Surface Inspection Systems,” R.S. Howland et al., Analytical Technologies, Jul./Aug. 1995 MICRO, pp. 61-71**.
“Measurement of Hemispherical Directional Reflectance in the Infared.” J.T. Neu, SPIE, Optical Scanning vol. 1995, 1993**.
“Discrete Sources Method For The Silicon Wafers Defect Discrimination,” Yuri Eremin and N. Orlov, J. 12thAnnual Review of Progress in Applied Computational Electromagnetics, Mar. 18-22, 1996, pp. 758-763**.
“Determination of COP Distribution After SCI Cleaning By A Laser Particle Counter,” T. Fujise et al., Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, SPIE Proc. vol. 2877, Oct. 16, 1998, pp. 16-25**.


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