Optical scanning device and method of manufacturing the same

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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Reexamination Certificate

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07403317

ABSTRACT:
An optical scanning device is disclosed that is manufactured through a simple mounting process and is provided with a hermetically sealed oscillation space for an oscillation mirror. The optical scanning device includes plural drive electrodes for driving the oscillation mirror and plural external electrodes of the drive electrodes that are formed at the same height.

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